Suspended Large-Area MEMS-Based Optical Filters for...

Journal of Microelectromechanical Systems 2015 / 8 Vol. 24; Iss. 4

Suspended Large-Area MEMS-Based Optical Filters for Multispectral Shortwave Infrared Imaging Applications

Tripathi, Dhirendra Kumar, Jiang, Fei, Rafiei, Ramin, Dilusha Silva, K. K. M. B., Antoszewski, Jarek, Martyniuk, Mariusz, Dell, John M., Faraone, Lorenzo
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2385081
Date:
August, 2015
File:
PDF, 1.83 MB
english, 2015
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