[IEEE 2014 IEEE Workshop on Wide Bandgap Power Devices and Applications (WiPDA) - Knoxville, TN, USA (2014.10.13-2014.10.15)] 2014 IEEE Workshop on Wide Bandgap Power Devices and Applications - Process optimization of multicycle rapid thermal annealing of Mg-implanted GaN
Greenlee, Jordan D., Feigelson, Boris N., Anderson, Travis J., Tadjer, Marko J., Hite, Jennifer K., Eddy, Charles R., Hobart, Karl D., Kub, Francis J.Year:
2014
Language:
english
DOI:
10.1109/WiPDA.2014.6964624
File:
PDF, 2.36 MB
english, 2014