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SPIE Proceedings [SPIE Optics and Measurement Conference 2014 - Liberec, Czech Republic (Tuesday 7 October 2014)] Optics and Measurement Conference 2014 - Three-coordinate laser heterodyne interferometer for metrological assurance of scanning probe microscopes
Kovačičinová, Jana, Vít, Tomáš, Kazieva, Tatiana V., Kuznetsov, Andrey P., Gubskiy, Konstantin L., Reshetov, Vladimir N.Volume:
9442
Year:
2015
Language:
english
DOI:
10.1117/12.2086921
File:
PDF, 364 KB
english, 2015