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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California (Sunday 1 August 2010)] Interferometry XV: Techniques and Analysis - Comparison of different film thickness evaluation algorithms applicable to spectrometric interrogation systems
Hirth, Florian, Pérez Grassi, Ana, Dorigo, Daniel G., Koch, Alexander W., Towers, Catherine E., Schmit, Joanna, Creath, KatherineVolume:
7790
Year:
2010
Language:
english
DOI:
10.1117/12.859687
File:
PDF, 288 KB
english, 2010