Correlation between properties of HfO_2 films and preparing...

Applied Optics 2014 / 02 Vol. 53; Iss. 4

Correlation between properties of HfO_2 films and preparing parameters by ion beam sputtering deposition

Liu, Huasong, Jiang, Yugang, Wang, Lishuan, Leng, Jian, Sun, Peng, Zhuang, Kewen, Ji, Yiqin, Cheng, Xinbin, Jiao, Hongfei, Wang, Zhanshan, Wu, Bingjun
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Volume:
53
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.53.00a405
Date:
February, 2014
File:
PDF, 773 KB
english, 2014
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