Time-and-frequency domains approach to data processing in...

Time-and-frequency domains approach to data processing in multiwavelength optical scatterometry of dielectric gratings

Granet, Gérard, Melezhik, Petr, Sirenko, Kostyantyn, Yashina, Nataliya
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Volume:
30
Language:
english
Journal:
Journal of the Optical Society of America A
DOI:
10.1364/josaa.30.000427
Date:
March, 2013
File:
PDF, 1.67 MB
english, 2013
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