Time-and-frequency domains approach to data processing in multiwavelength optical scatterometry of dielectric gratings
Granet, Gérard, Melezhik, Petr, Sirenko, Kostyantyn, Yashina, NataliyaVolume:
30
Language:
english
Journal:
Journal of the Optical Society of America A
DOI:
10.1364/josaa.30.000427
Date:
March, 2013
File:
PDF, 1.67 MB
english, 2013