The direct growth of carbon nanotubes as vertical interconnects in 3D integrated circuits
Vollebregt, Sten, Ishihara, RyoichiVolume:
96
Language:
english
Journal:
Carbon
DOI:
10.1016/j.carbon.2015.09.071
Date:
January, 2016
File:
PDF, 1.34 MB
english, 2016