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The measurement uncertainties in the laser interferometry-based sensing and tracking technique
Pek Loo Teoh, Bijan Shirinzadeh, Chee Wei Foong, Gürsel AliciVolume:
32
Year:
2002
Language:
english
Pages:
16
DOI:
10.1016/s0263-2241(02)00006-4
File:
PDF, 989 KB
english, 2002