Microstructure and piezoelectric properties of AlN thin...

Micro & Nano Letters 2012 / 12 Vol. 7; Iss. 12

Microstructure and piezoelectric properties of AlN thin films grown on stainless steel for the application of vibration energy harvesting

Zhang, Jin Y., Kuwano, Hiroki, Wang, Qi, Cao, Ziping
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Volume:
7
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2012.0545
Date:
December, 2012
File:
PDF, 202 KB
english, 2012
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