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Fluid modeling for plasma-enhanced direct current chemical vapor deposition
Ismagilov, Rinat R., Khamidullin, Ildar R., Kleshch, Victor I., Malykhin, Sergei A., Alexeev, Andrey M., Obraztsov, Alexander N.Volume:
10
Language:
english
Journal:
Journal of Nanophotonics
DOI:
10.1117/1.JNP.10.103598
Date:
September, 2015
File:
PDF, 1.87 MB
english, 2015