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SPIE Proceedings [SPIE Biomolecular photonoics and Multidimensional Microscopy - Wuhan, China (Sunday 8 June 2003)] Biomolecular Photonics and Multidimensional Microscopy - 3D analysis of defects in integrated circuits by one-photon optical- beam-induced current imaging and laser confocal reflectance microscopy
Miranda, Jelda J., Saloma, Caesar, Luo, Qingming, Gu, MinVolume:
5255
Year:
2003
Language:
english
DOI:
10.1117/12.546234
File:
PDF, 273 KB
english, 2003