Corrective finishing of extreme ultraviolet photomask...

Applied Optics 2014 / 05 Vol. 53; Iss. 14

Corrective finishing of extreme ultraviolet photomask blanks by precessed bonnet polisher

Beaucamp, Anthony, Namba, Yoshiharu, Charlton, Phillip
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Volume:
53
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.53.003075
Date:
May, 2014
File:
PDF, 1.09 MB
english, 2014
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