![](/img/cover-not-exists.png)
Integral equation analysis and optimization of 2D layered nanolithography masks by complex images Green’s function technique in TM polarization
Haghtalab, Mohammad, Faraji-Dana, RezaVolume:
29
Language:
english
Journal:
Journal of the Optical Society of America A
DOI:
10.1364/josaa.29.000748
Date:
May, 2012
File:
PDF, 575 KB
english, 2012