Multilayer microheater based on glass substrate using MEMS...

Microelectronic Engineering 2016 / 01 Vol. 149

Multilayer microheater based on glass substrate using MEMS technology

Chang, Wen-Yang, Hsihe, Yu-Sheng
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Volume:
149
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.09.005
Date:
January, 2016
File:
PDF, 1.85 MB
english, 2016
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