Fabrication of MEMS Platform for Sensors Applications by Laser Micro Engraving
Oblov, Konstantin, Ivanova, Anastasia, Soloviev, Sergey, Samotaev, Nikolay, Vasiliev, Alexey, Sokolov, AndreyVolume:
72
Year:
2015
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2015.09.013
File:
PDF, 495 KB
english, 2015