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[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - Computer simulation of ion implantation with visual observation of the implantation profiles
Djurabekova, F.G., Pugacheva, T.S., Umarov, F.F., Yugay, S.V.Year:
2000
Language:
english
DOI:
10.1109/.2000.924131
File:
PDF, 744 KB
english, 2000