[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - A high-resolution resonant MEMS accelerometer
Zou, Xudong, Seshia, Ashwin A.Year:
2015
Language:
english
DOI:
10.1109/TRANSDUCERS.2015.7181156
File:
PDF, 1.15 MB
english, 2015