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Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths
Mojarad, Nassir, Fan, Daniel, Gobrecht, Jens, Ekinci, YasinVolume:
39
Language:
english
Journal:
Optics Letters
DOI:
10.1364/OL.39.002286
Date:
April, 2014
File:
PDF, 638 KB
english, 2014