Improved algorithm for multiwavelength single-shot interferometric surface profiling: speeding up the multiwavelength-integrated local model fitting method by local information sharing
Nakata, Keisuke, Sugiyama, Masashi, Kitagawa, Katsuichi, Otsuki, MasafumiVolume:
52
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.52.004042
Date:
June, 2013
File:
PDF, 1.59 MB
english, 2013