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[OSA Optical Interference Coatings - Whistler (2013..-..)] Optical Interference Coatings - Design of Aperiodic Multilayers for EUV Applications

Tikhonravov, Alexander V., Trubetskov, Michael K., Sharapova, Svetlana, Wang, Zhanshan
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Year:
2013
Language:
english
DOI:
10.1364/oic.2013.tb.8
File:
PDF, 104 KB
english, 2013
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