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Fractional Talbot lithography with extreme ultraviolet light
Kim, Hyun-su, Li, Wei, Danylyuk, Serhiy, Brocklesby, William S., Marconi, Mario C., Juschkin, LarissaVolume:
39
Language:
english
Journal:
Optics Letters
DOI:
10.1364/ol.39.006969
Date:
December, 2014
File:
PDF, 670 KB
english, 2014