Effect of Nitrogen Content on the Mechanical Properties of...

Key Engineering Materials 2015 / 9 Vol. 662

Effect of Nitrogen Content on the Mechanical Properties of Amorphous SiCN Films

Ctvrtlik, Radim, Kulikovsky, Valeriy, Tomastik, Jan
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Volume:
662
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.662.95
Date:
September, 2015
File:
PDF, 413 KB
english, 2015
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