Characteristics and mechanism of phase change material...

Thin Solid Films 2015 / 10 Vol. 593

Characteristics and mechanism of phase change material W0.03Sb2Te etched by Cl2/BCl3 inductively coupled plasmas

Shen, Lanlan, Song, Sannian, Zhang, Zhonghua, Song, Zhitang, Cheng, Yan, Zhu, Yueqin, Guo, Xiaohui, Yin, Weijun, Yao, Dongning, Liu, Bo, Feng, Songlin
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Volume:
593
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.09.032
Date:
October, 2015
File:
PDF, 1.08 MB
english, 2015
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