Characterization of microchannel Si by HRXD and topography

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Characterization of microchannel Si by HRXD and topography

I. L. Shul'pina, E. V. Astrova, V. V. Ratnikov, A. D. Remenyuk, A. G. Tkachenko
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Year:
2001
Language:
english
DOI:
10.1088/0022-3727/34/10A/329
File:
PDF, 209 KB
english, 2001
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