Precipitation of superstructured nano-crystals in high-dose...

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Precipitation of superstructured nano-crystals in high-dose implanted Si: an XHRTEM study

G. Zollo, M. Kalitzova, D. Manno, G. Vitali
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Year:
2004
Language:
english
DOI:
10.1088/0022-3727/37/19/018
File:
PDF, 729 KB
english, 2004
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