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Diffusion of Ion Implanted As in Si 1- x Ge x Epilayers
Lyu-fan), Zou Lü-fan (Zou, Zhan-guo, Wang, Dian-zhao, Sun, Ti-wen, Fan, Xue-feng, Liu, Jing-wei, ZhangVolume:
14
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/14/1/014
Date:
January, 1997
File:
PDF, 310 KB
english, 1997