A Novel Contactless Method for Characterization of...

Chinese Physics Letters 2002 / 09 Vol. 19; Iss. 9

A Novel Contactless Method for Characterization of Semiconductors: Surface Electron Beam Induced Voltage in Scanning Electron Microscopy

Shi-Qiu, Zhu, Rau, E. I., Fu-Hua, Yang, Hou-Zhi, Zheng
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Volume:
19
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/19/9/335
Date:
September, 2002
File:
PDF, 282 KB
english, 2002
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