An a-C:F:H Film with High-Thermal Stability by Electron...

Chinese Physics Letters 2003 / 03 Vol. 20; Iss. 3

An a-C:F:H Film with High-Thermal Stability by Electron Cyclotron Resonance Chemical Vapour Deposition at Room Temperature

Yu, Xin, Sheng-Hua, Xu, Zhao-Yuan, Ning, Xin-Hua, Lu, Mei-Fu, Jiang, Song, Huang, Wei, Du, Jun, Chen, Chao, Ye, Shan-Hua, Cheng
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Volume:
20
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/20/3/332
Date:
March, 2003
File:
PDF, 240 KB
english, 2003
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