A Novel Reactive Gas Source and Its Application to Carbon Nanotube Film Deposition
Nan, Jiang, Han-Yuan, Chen, Sheng-Fa, QianVolume:
22
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/22/1/046
Date:
January, 2005
File:
PDF, 255 KB
english, 2005