Fabrication of 11-nm-Wide Silica-Like Lines Using X-Ray...

Chinese Physics Letters 2009 / 08 Vol. 26; Iss. 8

Fabrication of 11-nm-Wide Silica-Like Lines Using X-Ray Diffraction Exposure

Xiao-Li, Zhu, Chang-Qing, Xie, Man-Hong, Zhang, Ming, Liu, Bao-Qin, Chen, Feng, Pan
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Volume:
26
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/26/8/086803
Date:
August, 2009
File:
PDF, 131 KB
english, 2009
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