Characterization of semiconductor sub-micron gratings: is...

Characterization of semiconductor sub-micron gratings: is there an alternative to scanning electron microscopy?

Bonard, Jean-Marc, Ganière, Jean-Daniel, Morier-Genoud, François, Achtenhagen, Martin
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Volume:
11
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/11/3/021
Date:
March, 1996
File:
PDF, 377 KB
english, 1996
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