Influence of HF etching on the velocity of surface acoustic...

Semiconductor Science and Technology 2001 / 08 Vol. 16; Iss. 8

Influence of HF etching on the velocity of surface acoustic phonons in air-aged porous silicon layers

Andrews, G T, Clouter, M J
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Volume:
16
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/16/8/307
Date:
August, 2001
File:
PDF, 68 KB
english, 2001
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