Microfabrication of diamond films by localized electron beam chemical vapour deposition
Kiyohara, Shuji, Takamatsu, Hideaki, Mori, KatsumiVolume:
17
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/17/10/311
Date:
October, 2002
File:
PDF, 264 KB
english, 2002