A novel method of determining semiconductor parameters in...

Semiconductor Science and Technology 2003 / 04 Vol. 18; Iss. 4

A novel method of determining semiconductor parameters in EBIC and SEBIV modes of SEM

Zhu, Shi-Qiu, Rau, E I, Yang, Fu-Hua
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/18/4/329
Date:
April, 2003
File:
PDF, 159 KB
english, 2003
Conversion to is in progress
Conversion to is failed