A comprehensive study of reducing the STI mechanical stress...

Semiconductor Science and Technology 2007 / 12 Vol. 22; Iss. 12

A comprehensive study of reducing the STI mechanical stress effect on channel-width-dependent I dsat

Li, Rui, Yu, Liujiang, Xin, Haiwei, Dong, Yemin, Tao, Kai, Wang, Chingdong
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Volume:
22
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/22/12/009
Date:
December, 2007
File:
PDF, 991 KB
english, 2007
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