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Exposure of InP to hydrogen plasma in the presence of a 'sacrificial' InP-an X-ray photoelectron spectroscopic study
Balasubramanian, S, Gopinath, C S, Subramanian, S, Balasubramanian, NVolume:
9
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/9/9/006
Date:
September, 1994
File:
PDF, 297 KB
english, 1994