Negative photoresists and integrated optics
Clair, J-J, Frejlich, J, Jonathan, J M J, Torrès, L HVolume:
6
Language:
english
Journal:
Nouvelle Revue d'Optique
DOI:
10.1088/0335-7368/6/5/307
Date:
September, 1975
File:
PDF, 494 KB
english, 1975