Adsorption of metal impurities on H-terminated Si surfaces...

Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si

Hynninen, Teemu, Foster, Adam S, Gosálvez, Miguel A, Sato, Kazuo, Nieminen, Risto M
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Volume:
20
Language:
english
Journal:
Journal of Physics: Condensed Matter
DOI:
10.1088/0953-8984/20/48/485005
Date:
December, 2008
File:
PDF, 861 KB
english, 2008
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