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The effect of plasma impurities on the sputtering of tungsten carbide
Vörtler, K, Björkas, C, Nordlund, KVolume:
23
Language:
english
Journal:
Journal of Physics: Condensed Matter
DOI:
10.1088/0953-8984/23/8/085002
Date:
March, 2011
File:
PDF, 567 KB
english, 2011