High-resolution, high-speed, low data age uncertainty,...

High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics

Demarest, Frank C
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Volume:
9
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/9/7/003
Date:
July, 1998
File:
PDF, 159 KB
english, 1998
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