Technology computer-aided design modelling of single-atom doping for fabrication of buried nanostructures
Pakes, C I, George, D P, Jamieson, D N, Yang, C J, Dzurak, A S, Gauja, E, Clark, R GVolume:
14
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/14/2/311
Date:
February, 2003
File:
PDF, 167 KB
english, 2003