Measurement of the strength of adhesion of resist patterns using an atomic force microscope
Kim, Sung-Kyoung, Jung, Myoung-Ho, Kim, Hyun-Woo, Woo, Sang-Gyun, Lee, HaiwonVolume:
16
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/16/10/042
Date:
October, 2005
File:
PDF, 1.37 MB
english, 2005