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Nanogroove formation by ion irradiation on indentation-modified amorphous SiO 2
Pan, J, Takeda, Y, Amekura, H, Nakayama, Y, Song, M, Kishimoto, NVolume:
19
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/19/37/375306
Date:
September, 2008
File:
PDF, 793 KB
english, 2008