Gallium assisted plasma enhanced chemical vapor deposition...

Gallium assisted plasma enhanced chemical vapor deposition of silicon nanowires

Zardo, I, Yu, L, Conesa-Boj, S, Estradé, S, Alet, Pierre Jean, Rössler, J, Frimmer, M, Roca i Cabarrocas, P, Peiró, F, Arbiol, J, Morante, J R, Fontcuberta i Morral, A
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Volume:
20
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/20/15/155602
Date:
April, 2009
File:
PDF, 3.06 MB
english, 2009
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