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Metal positioning on silicon surfaces using the etching of buried dislocation arrays
Bavard, A, Fournel, F, Eymery, JVolume:
22
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/22/21/215301
Date:
May, 2011
File:
PDF, 1.12 MB
english, 2011