Pattern transfer to silicon by microcontact printing and...

Nanotechnology 1996 / 12 Vol. 7; Iss. 4

Pattern transfer to silicon by microcontact printing and RIE

Whidden, Thomas K, Ferry, David K, Kozicki, Michael N, Kim, Enoch, Kumar, Amit, Wilbur, James, Whitesides, George M
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Volume:
7
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/7/4/027
Date:
December, 1996
File:
PDF, 648 KB
english, 1996
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