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Photoassisted deposition of conducting palladium films
Kim, Yoon-Gi, Bialy, S, Stauf, G T, Miller, R W, Spencer, J T, Dowben, P A, Datta, SVolume:
1
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/1/1/008
Date:
March, 1991
File:
PDF, 268 KB
english, 1991