Design of linear-motion microactuators using piezoelectric...

Design of linear-motion microactuators using piezoelectric thin films

Robbins, W P, Polla, D L, Tamagawa, T, Glumac, D E, Tjhen, W
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Volume:
1
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/1/4/006
Date:
December, 1991
File:
PDF, 452 KB
english, 1991
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