Parallel-plate electrostatic actuation with vertical hinges

Journal of Micromechanics and Microengineering 2001 / 09 Vol. 11; Iss. 5

Parallel-plate electrostatic actuation with vertical hinges

Gel, Murat, Shimoyama, Isao
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Volume:
11
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/11/5/317
Date:
September, 2001
File:
PDF, 387 KB
english, 2001
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