Integrated micro-displacement sensor that uses beam...

Journal of Micromechanics and Microengineering 2003 / 11 Vol. 13; Iss. 6

Integrated micro-displacement sensor that uses beam divergence

Ito, Takahiro, Sawada, Renshi, Higurashi, Eiji
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Volume:
13
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/6/317
Date:
November, 2003
File:
PDF, 191 KB
english, 2003
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